About the Ultra Low Flow series back pressure regulators

Cv: 1·E-09 to 0.05  |  Max. Temperature: 300°C  |  Max. Pressure: 690 barg (10.000 PSI)


Equilibar® its ULF (Ultra Low Flow) series can achieve stable pressure control in ultra low flow applications. In addition, the units can be used from subatmospheric pressure up to 690 bar (10.000 PSI). The ULF series fills the gap between the Low Flow series (also called standard multi-orifice series) and the zero flow series.

These back pressure regulators are based on the Equilibar’s multi-orifice concept. It has 4 inlet orifices like all other research series back pressure regulators. The difference between the ULF regulator and the standard series is that the ULF has only one single outlet orifice. The single outlet orifice reduces the Cv value, therefore achieving an excellent ultra low flow performance. The diaphragm slightly deforms over the orifice, resulting in low flow. Proper setting of the diaphragm optimizes the sealing capacities and low flow performance.

Check out the explanation of the Ultra-Low-Flow series in this video:

If your application requires regulating pressure with zero flow, you might want to select the ZF series. You can convert the ULF series into the ZF series yourself with only two spare parts if you need to. It takes only a few minutes to rebuild the unit and it doesn’t take any tuning.

The ULF series is available in 206 bar (3000 PSI), 412 bar (6000 PSI) and 690 bar (10.000 PSI). You can find more in-depth information about the various back pressure regulators below.

Do you want to know more about this product?

The working of an Equilibar Dome Loaded Back Pressure Regulator

How to Rebuild your Equilibar Back Pressure Regulator

Different materials that are used to make Equilibar Back Pressure Regulators and diaphragms

PCS – Equilibar Back Pressure Regulator Ultra Low Flow Series

Ultra-low mass flow control 0,1…10 gr/h at high pressure (up to 200 bar) – Coriolis flowmeter combined with Equilibar diaphragm sealed control valve